The UGent cleanroom

The Photonics Research Group hosts an ISO class 5 cleanroom for the fabrication of integrated integrated circuits (PICs) as well as the post processing of existing wafer scale PICs. It is equipped with mask aligners for UV photolithography, Voyager e-beam with sub 50 nm resolution, a Laser Direct Imaging transfert printer, polishing machine, wafer bonder, reactive ion etching, deposition tools via sputtering, PECVD, and spin coating, as well as inspection tools: ellipsometer, microscope, SEM, profilometer. The photonics research group is moreover an associated lab of imec. Imec is an electronics research center hosting 200mm and 300mm CMOS fabrication facilities.

The Photonics Research Group

The Photonics Research Group hosts a measurement facility for characterizing active and passive photonics integrated circuits. The measurement facility includes lasers from the UV to the mid infrared, spectrometers, optical and electrical spectrum analyzers, network analyzer, fast optoelectronics, specialized detectors (single photon, balanced detectors, 60 GHz photodiodes, femtowatt receiver, mid-IR detectors, cameras), fully automated wafer scale characterization setup, photoluminescence, Raman and chi(2) characterization setups.


The OPERA-photonics group hosts a state-of-the-art optics laboratory well equipped to work in the near and short-wave infrared (from 700 up to 2300 nm). It has multiple laser sources (CW and pulsed mode locked) and fibre amplifiers, devices for the temporal, spectral and spatial analysis of laser beams, and for the manipulation of optical and electrical signals with, amongst others: Detectors up to 60 GHz that can be coupled to 50GS/s oscilloscopes or to spectrum analysers; Amplitude and phase high frequency optical modulator (10-40GHz); Autocorrelators covering the picosecond and femtosecond ranges, around 800 nm, 1550 nm and 2200 nm, with FROG capabilities around 800 nm and 1550 nm; Optical spectrum analysers covering the wavelength range 650–‒2600 nm; PM fibre splicer and material to couple light in and out of guiding structures such as fibres or photonic nanowires. A multiphoton-microscope working around 800 nm is also available.The quantum optics capability include cryogenically cooled superconducting detectors, single photon avalanche photodiodes, photon pair sources, and time tagging electronics.