The UGent cleanroom
The Photonics Research Group hosts an ISO class 5 cleanroom for the fabrication of integrated integrated circuits (PICs) as well as the post processing of existing wafer scale PICs. It is equipped with mask aligners for UV photolithography, Voyager e-beam with sub 50 nm resolution, a Laser Direct Imaging transfert printer, polishing machine, wafer bonder, reactive ion etching, deposition tools via sputtering, PECVD, and spin coating, as well as inspection tools: ellipsometer, microscope, SEM, profilometer. The photonics research group is moreover an associated lab of imec. Imec is an electronics research center hosting 200mm and 300mm CMOS fabrication facilities.
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